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Preparation of ZrO2-SnO2 thin films by the sol-gel technique and their gas sensitivity
G. J. Fang; Z. L. Liu; Z. C. Zhang; K. L. Yao
1996
发表期刊Physica Status Solidi a-Applied Research
ISSN0031-8965
卷号156期号:1页码:81-85
摘要Pure and ZrO2-doped SnO2 thin films were prepared on ordinary soda-lime glass sheets by the sol-gel technique, using non-alkoxide SnCl2 . 2 H2O as main precursor, Zr(OC3H7)(4) as dopant, methanol as solvent. The gas sensing properties of the thin films were investigated. The relationship between the gas sensitivity and the gas concentration and working temperature was also studied. The experimental results show that by the ZrO2 dopant, the gas sensitivity of SnO2 thin films was greatly enhanced and the sensing temperature zone of the SnO2 thin film was moved to the low temperature area. The ZrO2SnO2 thin film shows excellent and unique sensing properties to H2S, i.e., good sensitivity, high selectivity, and quick response and recovery behaviour at room temperature. The gas sensing mechanism of SnO2/ZrO2-SnO2 thin films to H2S gas is also discussed.
部门归属acad sinica,int ctr mat phys,shenyang 110015,peoples r china. ccast,world lab,beijing 100080,peoples r china. xiangyang teachers coll,dept phys,xiangtan 441053,hubei,peoples r china.;fang, gj (reprint author), huazhong univ sci & technol,dept phys,wuhan 430074,peoples r china
关键词H2s Sensors
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文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/38277
专题中国科学院金属研究所
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GB/T 7714
G. J. Fang,Z. L. Liu,Z. C. Zhang,et al. Preparation of ZrO2-SnO2 thin films by the sol-gel technique and their gas sensitivity[J]. Physica Status Solidi a-Applied Research,1996,156(1):81-85.
APA G. J. Fang,Z. L. Liu,Z. C. Zhang,&K. L. Yao.(1996).Preparation of ZrO2-SnO2 thin films by the sol-gel technique and their gas sensitivity.Physica Status Solidi a-Applied Research,156(1),81-85.
MLA G. J. Fang,et al."Preparation of ZrO2-SnO2 thin films by the sol-gel technique and their gas sensitivity".Physica Status Solidi a-Applied Research 156.1(1996):81-85.
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