Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS)

IMR OpenIR

	Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS)
	Guo, XT; Niu, YS; Chen, MH; Sun, WY; Zhu, SL; Wang, FH; Chen, MH (reprint author), Northeastern Univ, Minist Educ, Sch Mat Sci & Engn, Key Lab Anisotropy & Texture Mat, Shenyang 110819, Liaoning, Peoples R China.; Niu, YS (reprint author), Chinese Acad Sci, Inst Met Res, Lab Corros & Protect, Shenyang 110016, Liaoning, Peoples R China.
	2018
发表期刊	APPLIED SURFACE SCIENCE
ISSN	0169-4332
卷号	427 页码:1071-1079
摘要	Thick Ta(N) coating of 51 mu m has been successfully obtained by DCMS technology. Ta(N) is a kind of distorted Ta matrix, which is inter-soluble with N-defect lattice structure, forming the disabled bcc structure. From the XRD and XPS investigations, the composition of Ta(N) coating is consisted of bcc-Ta and bcc-TaN0.06, while that of Ta coating mainly contains beta-Ta phase. It can be concluded from wear test, nanoindentation test and SEM observations, wear resistance of Ta(N) coating is much better than that of Ta coating, due to its high hardness, H/E, H-3/E-2 value and low COF value. The wear mechanism of Ta coating is the compound fatigue and abrasive wear, while that of Ta(N) coating is transformed into adhesive wear mechanism. The secondary adhesion of the plastic deformation for the Ta(N) coating can reinforce the coated surface, to improve the load-bearing and anti-wear capacities, and thus improve the wear resistance. (C) 2017 Elsevier B.V. All rights reserved.; Thick Ta(N) coating of 51 mu m has been successfully obtained by DCMS technology. Ta(N) is a kind of distorted Ta matrix, which is inter-soluble with N-defect lattice structure, forming the disabled bcc structure. From the XRD and XPS investigations, the composition of Ta(N) coating is consisted of bcc-Ta and bcc-TaN0.06, while that of Ta coating mainly contains beta-Ta phase. It can be concluded from wear test, nanoindentation test and SEM observations, wear resistance of Ta(N) coating is much better than that of Ta coating, due to its high hardness, H/E, H-3/E-2 value and low COF value. The wear mechanism of Ta coating is the compound fatigue and abrasive wear, while that of Ta(N) coating is transformed into adhesive wear mechanism. The secondary adhesion of the plastic deformation for the Ta(N) coating can reinforce the coated surface, to improve the load-bearing and anti-wear capacities, and thus improve the wear resistance. (C) 2017 Elsevier B.V. All rights reserved.
部门归属	[guo, xiaotong ; chen, minghui ; wang, fuhui] northeastern univ, minist educ, sch mat sci & engn, key lab anisotropy & texture mat, shenyang 110819, liaoning, peoples r china ; [niu, yunsong ; sun, wenyao ; zhu, shenglong] chinese acad sci, inst met res, lab corros & protect, shenyang 110016, liaoning, peoples r china
关键词	Mechanical-properties Low-energy Films Tantalum Wear Microstructure Nitrogen Power Tan Environments
学科领域	Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
资助者	National Natural Science Foundation of China [51671053, 51701223]; Youth Innovation Promotion Association CAS [2016178]; Fundamental Research Funds for the Central Universities [N160205001]
收录类别	SCI
语种	英语
WOS记录号	WOS:000415219100133
引用统计	被引频次：21[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/79625
专题	中国科学院金属研究所
通讯作者	Chen, MH (reprint author), Northeastern Univ, Minist Educ, Sch Mat Sci & Engn, Key Lab Anisotropy & Texture Mat, Shenyang 110819, Liaoning, Peoples R China.; Niu, YS (reprint author), Chinese Acad Sci, Inst Met Res, Lab Corros & Protect, Shenyang 110016, Liaoning, Peoples R China.
推荐引用方式 GB/T 7714	Guo, XT,Niu, YS,Chen, MH,et al. Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS)[J]. APPLIED SURFACE SCIENCE,2018,427:1071-1079.
APA	Guo, XT.,Niu, YS.,Chen, MH.,Sun, WY.,Zhu, SL.,...&Niu, YS .(2018).Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS).APPLIED SURFACE SCIENCE,427,1071-1079.
MLA	Guo, XT,et al."Stoichiometry and tribological behavior of thick Ta(N) coatings produced by direct current magnetron sputtering (DCMS)".APPLIED SURFACE SCIENCE 427(2018):1071-1079.