Fabrication of atomically smooth SrRuO(3) thin films by laser molecular beam epitaxy

IMR OpenIR

	Fabrication of atomically smooth SrRuO(3) thin films by laser molecular beam epitaxy
	G. Z. Liu; M. He; K. J. Jin; G. Z. Yang; H. B. Lu; K. Zhao; S. J. Zheng; X. L. Ma
	2008
发表期刊	Science in China Series G-Physics Mechanics & Astronomy
ISSN	1672-1799
卷号	51 期号:7 页码:745-749
摘要	High-quality SrRuO(3) (SRO) thin films and SrTiO(3)/SRO bilayer were grown epitaxially on SrTiO(3) (STO)(001) substrates by laser molecular beam epitaxy. The results of in situ observation of reflection high-energy electron diffraction and ex situ X-ray diffraction theta-2 theta scan indicate that the SRO thin films have good crystallinity. The measurements of atomic force microscopy and scan tunneling microscopy reveal that the surface of the SRO thin film is atomically smooth. The resistivity of the SRO thin film is 300 mu Omega center dot cm at room temperature. Furthermore, the transmission electron microscopy study shows that the interfaces of STO/SRO and SRO/STO are very clear and no interfacial reaction layer was observed. The experimental results show that the SRO thin film is an excellent electrode material for devices based on perovskite oxide materials.
部门归属	[liu guozhen; he meng; jin kuijuan; yang guozhen; lue huibin] chinese acad sci, beijing natl lab condensed matter phys, inst phys, beijing 100080, peoples r china. [zhao kun] china univ petr, dept math & phys, beijing 102249, peoples r china. [zheng shijian; ma xiuliang] chinese acad sci, shenyang natl lab mat sci, inst met res, shenyang 110016, peoples r china.;lu, hb (reprint author), chinese acad sci, beijing natl lab condensed matter phys, inst phys, beijing 100080, peoples r china;hblu@aphy.iphy.ac.cn
关键词	Srruo(3) Thin Film Laser Molecular Beam Epitaxy Surface Morphology Growth Deposition Transition Surfaces Srtio3
URL	查看原文
WOS记录号	WOS:000256965800002
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/32943
专题	中国科学院金属研究所
推荐引用方式 GB/T 7714	G. Z. Liu,M. He,K. J. Jin,et al. Fabrication of atomically smooth SrRuO(3) thin films by laser molecular beam epitaxy[J]. Science in China Series G-Physics Mechanics & Astronomy,2008,51(7):745-749.
APA	G. Z. Liu.,M. He.,K. J. Jin.,G. Z. Yang.,H. B. Lu.,...&X. L. Ma.(2008).Fabrication of atomically smooth SrRuO(3) thin films by laser molecular beam epitaxy.Science in China Series G-Physics Mechanics & Astronomy,51(7),745-749.
MLA	G. Z. Liu,et al."Fabrication of atomically smooth SrRuO(3) thin films by laser molecular beam epitaxy".Science in China Series G-Physics Mechanics & Astronomy 51.7(2008):745-749.