Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate

IMR OpenIR

	Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate
其他题名	Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate
	Lin Zeng 1; Wang Feng 2; Gao Ding 1; Ba Dechun 1; Liu Chunming 2
	2013
发表期刊	PLASMA SCIENCE & TECHNOLOGY
ISSN	1009-0630
卷号	15 期号:7 页码:690-695
摘要	In this work, diamond-like-carbon (DLC) films were deposited onto polycarbonate (PC) substrates by radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD), and silicon films were prepared between DLC and PC substrates by magnetron sputtering deposition so as to improve the adhesion of the DLC films. The deposited films were investigated by means of field-emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Subsequently, the following frictional and optical properties of the films were measured: the friction coefficient by using a ball-on-disk tribometer, the scratch hardness by using a nano-indenter, the optical transmittance by using a UV/visible spectrometer. The effects of incident power upon the frictional and optical properties of the films were investigated. Films deposited at low incident powers showed large optical gaps, which decreased with increasing incident power. The optical properties of DLC films correlated to the sp(2) content of the coatings. High anti-scratch properties were obtained at higher values of incident power. The anti-scratch properties of DLC films correlated to the sp(3) content of the coatings.
其他摘要	In this work, diamond-like-carbon (DLC) fllms were deposited onto polycarbonate (PC) substrates by radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD), and silicon fllms were prepared between DLC and PC substrates by magnetron sputtering deposition so as to improve the adhesion of the DLC fllms. The deposited fllms were investigated by means of fleld-emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Subsequently, the following frictional and optical properties of the fllms were measured: the friction coefficient by using a ball-on-disk tribometer, the scratch hardness by using a nano-indenter, the optical transmittance by using a UV/visible spectrometer. The effects of incident power upon the frictional and optical properties of the fllms were investigated. Films deposited at low incident powers showed large optical gaps, which decreased with increasing incident power. The optical properties of DLC fllms correlated to the sp~2 content of the coatings. High anti-scratch properties were obtained at higher values of incident power. The anti-scratch properties of DLC fllms correlated to the sp~3 content of the coatings.
关键词	MECHANICAL-PROPERTIES FILMS DEPOSITION RAMAN diamond-like-carbon films PECVD microstructure frictional and optical properties
收录类别	CSCD
语种	英语
资助项目	[China Postdoctoral Science Foundation Funded Project] ; [Liaoning Province of China] ; [Shenyang City of China] ; [Fundamental Research Funds for the Central Universities, China]
CSCD记录号	CSCD:4881976
引用统计	被引频次：4[CSCD] [CSCD记录]
文献类型	期刊论文
条目标识符	http://ir.imr.ac.cn/handle/321006/158234
专题	中国科学院金属研究所
作者单位	1.东北大学 2.中国科学院金属研究所
推荐引用方式 GB/T 7714	Lin Zeng,Wang Feng,Gao Ding,et al. Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate[J]. PLASMA SCIENCE & TECHNOLOGY,2013,15(7):690-695.
APA	Lin Zeng,Wang Feng,Gao Ding,Ba Dechun,&Liu Chunming.(2013).Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate.PLASMA SCIENCE & TECHNOLOGY,15(7),690-695.
MLA	Lin Zeng,et al."Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate".PLASMA SCIENCE & TECHNOLOGY 15.7(2013):690-695.