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Laser direct writing of Ag films from solution on Si substrate
Sun, K; Zhang, CB; Zhao, Y
通讯作者Zhao, Y(yanzhao@imr.ac.cn)
2003-11-01
发表期刊JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
ISSN1005-0302
卷号19期号:6页码:634-636
摘要Pulsed Nd:YAG laser was used to irradiate Si substrate immersed in AgNO3 ethylene glycol solution to deposit Ag films along the lines scanned by laser on the substrate, which is a photo-thermal decomposing process.. The decomposed Ag atoms congregate and form polycrystalline Ag particles. The Ag concentration changes greatly with the total laser energy absorbed by substrate. Transmission electron microscopy (TEM) observation shows the Ag particles are inlaid in the Si substrate. Auger electron spectrum (AES) shows that the Ag concentration decreases with the increase of the sputtering depth, and there is no oxygen element on the surface of the deposited Ag films.
关键词pulsed Nd : YAG laser laser direct writing Ag deposited film Si substrate
收录类别SCI
语种英语
WOS研究方向Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号WOS:000188365400035
出版者JOURNAL MATER SCI TECHNOL
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.imr.ac.cn/handle/321006/116778
专题中国科学院金属研究所
通讯作者Zhao, Y
作者单位1.Northeastern Univ, Sch Sci, Shenyang 110004, Peoples R China
2.Chinese Acad Sci, Met Res Inst, Shenyang 110016, Peoples R China
推荐引用方式
GB/T 7714
Sun, K,Zhang, CB,Zhao, Y. Laser direct writing of Ag films from solution on Si substrate[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2003,19(6):634-636.
APA Sun, K,Zhang, CB,&Zhao, Y.(2003).Laser direct writing of Ag films from solution on Si substrate.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,19(6),634-636.
MLA Sun, K,et al."Laser direct writing of Ag films from solution on Si substrate".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 19.6(2003):634-636.
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