Laser direct writing of Ag films from solution on Si substrate | |
Sun, K; Zhang, CB; Zhao, Y | |
通讯作者 | Zhao, Y(yanzhao@imr.ac.cn) |
2003-11-01 | |
发表期刊 | JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
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ISSN | 1005-0302 |
卷号 | 19期号:6页码:634-636 |
摘要 | Pulsed Nd:YAG laser was used to irradiate Si substrate immersed in AgNO3 ethylene glycol solution to deposit Ag films along the lines scanned by laser on the substrate, which is a photo-thermal decomposing process.. The decomposed Ag atoms congregate and form polycrystalline Ag particles. The Ag concentration changes greatly with the total laser energy absorbed by substrate. Transmission electron microscopy (TEM) observation shows the Ag particles are inlaid in the Si substrate. Auger electron spectrum (AES) shows that the Ag concentration decreases with the increase of the sputtering depth, and there is no oxygen element on the surface of the deposited Ag films. |
关键词 | pulsed Nd : YAG laser laser direct writing Ag deposited film Si substrate |
收录类别 | SCI |
语种 | 英语 |
WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
WOS类目 | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
WOS记录号 | WOS:000188365400035 |
出版者 | JOURNAL MATER SCI TECHNOL |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.imr.ac.cn/handle/321006/116778 |
专题 | 中国科学院金属研究所 |
通讯作者 | Zhao, Y |
作者单位 | 1.Northeastern Univ, Sch Sci, Shenyang 110004, Peoples R China 2.Chinese Acad Sci, Met Res Inst, Shenyang 110016, Peoples R China |
推荐引用方式 GB/T 7714 | Sun, K,Zhang, CB,Zhao, Y. Laser direct writing of Ag films from solution on Si substrate[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2003,19(6):634-636. |
APA | Sun, K,Zhang, CB,&Zhao, Y.(2003).Laser direct writing of Ag films from solution on Si substrate.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,19(6),634-636. |
MLA | Sun, K,et al."Laser direct writing of Ag films from solution on Si substrate".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 19.6(2003):634-636. |
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